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Proceedings Paper

Nanocal calibration and pitch recertification of a Hitachi microscale standard
Author(s): Dmitry Yeremin; Arkady Nikitin; Al Sicignano; Matt Sandy; Tim Goldburt; Bryan Tracy
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Paper Abstract

The pitch of a Hitachi Standard Micro Scale was measured using NanoCal and a LEO 1560 SEM. The pitch pedigree and certification were intentionally withheld from Nanometrology team members to enable independent measurement and certification of an unknown Hitachi Micro Scale standard during this work. NanoCal allows one to achieve pitch measurements with sub-nanometer accuracy and precision as well as to perform SEM magnification calibration with the precision and accuracy required for sub 90 nm SEM metrology.

Paper Details

Date Published: 24 May 2004
PDF: 3 pages
Proc. SPIE 5375, Metrology, Inspection, and Process Control for Microlithography XVIII, (24 May 2004); doi: 10.1117/12.536095
Show Author Affiliations
Dmitry Yeremin, Nanometrology LLC (United States)
Arkady Nikitin, Nanometrology LLC (United States)
Al Sicignano, Nanometrology LLC (United States)
Matt Sandy, Nanometrology LLC (United States)
Tim Goldburt, Nanometrology LLC (United States)
Bryan Tracy, FASL, LLC (United States)


Published in SPIE Proceedings Vol. 5375:
Metrology, Inspection, and Process Control for Microlithography XVIII
Richard M. Silver, Editor(s)

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