Share Email Print
cover

Proceedings Paper

Use case approach to integrating and implementing lithography run-to-run control
Author(s): Dorit Karlikar; Irit K. Abramovich; Miri Kish; David Crow; Etienne Joubert; Alan Carlson
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The benefits of using a run-to-run control system for overlay and CD control have been well documented. However, before any these benefits can be achieved, one must first integrate the run-to-run control system into the existing automation and manufacturing execution system (MES) environment. Integration details that are overlooked during the planning stages often times create unnecessary challenges down the road that can delay reaching advantageous control results. INFICON has developed a novel methodology of documenting process and integration requirements. This method, termed Use Case Review, congregates the appropriate resources from the supplier and the customer to review and customize a predetermined set of documents that describe the run-to-run controller. Each use case contains a flow diagram and a detailed sequence of transactions documenting the actors (Automation PC, Process Equipment, MES, etc.) and variables (Lot ID, Process Level ID, Recipe ID, etc.) involved. The combined set of use cases covers all aspects of integrating a lithography run-to-run controller. During the implementation of NVS ARGUS, TOWER Semiconductor Ltd. benefited from use case review and customization.

Paper Details

Date Published: 29 April 2004
PDF: 8 pages
Proc. SPIE 5378, Data Analysis and Modeling for Process Control, (29 April 2004); doi: 10.1117/12.535667
Show Author Affiliations
Dorit Karlikar, Tower Semiconductor Ltd. (Israel)
Irit K. Abramovich, Tower Semiconductor Ltd. (Israel)
Miri Kish, Tower Semiconductor Ltd. (Israel)
David Crow, INFICON (United States)
Etienne Joubert, INFICON (United States)
Alan Carlson, INFICON (United States)


Published in SPIE Proceedings Vol. 5378:
Data Analysis and Modeling for Process Control
Kenneth W. Tobin, Editor(s)

© SPIE. Terms of Use
Back to Top