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Proceedings Paper

Fluence-dependent transmission in CaF2 including correlation with thermally stimulated current
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Paper Abstract

Calcium fluoride exhibits a fluence dependent transmission behavior at the 193 nm excimer laser wavelength of interest for photolithography applications. The transmission as a function of fluence is determined using a 193 nm excimer laser based transmission measurement system. Different transmission decay rate and saturation level is observed and correlated with structural defects and impurities. Thermally stimulated current measurements are applied to identify defects and correlate the relative concentration of mobile anion vacancies with fluence dependent transmission.

Paper Details

Date Published: 28 May 2004
PDF: 8 pages
Proc. SPIE 5377, Optical Microlithography XVII, (28 May 2004); doi: 10.1117/12.535651
Show Author Affiliations
Glenn E. Kohnke, Corning Inc. (United States)
Chong An, Corning Inc. (United States)
Charlene M. Smith, Corning Inc. (United States)
Paula J. Holmes, Corning Inc. (United States)


Published in SPIE Proceedings Vol. 5377:
Optical Microlithography XVII
Bruce W. Smith, Editor(s)

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