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Proceedings Paper

EPL data conversion system
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Paper Abstract

PATACON-EPL is a software product for converting semiconductor mask CAD data to the EB data of masks for EB steppers. This software has several functions, such as pattern placement corresponding to the structure of masks for EB steppers, complementary division for stencil masks, stitching for deforming the shape of a portion for connecting divided portions, proximity effect correction, machine control data generation, mask inspection data generation, and alignment mark insertion. This software operates in the environment in which several to some hundreds of Linux PC's are connected by a high-speed network.

Paper Details

Date Published: 20 May 2004
PDF: 10 pages
Proc. SPIE 5374, Emerging Lithographic Technologies VIII, (20 May 2004); doi: 10.1117/12.535002
Show Author Affiliations
Masahiro Shoji, Nippon Control System Corp. (Japan)
Nobuyasu Horiuchi, Nippon Control System Corp. (Japan)


Published in SPIE Proceedings Vol. 5374:
Emerging Lithographic Technologies VIII
R. Scott Mackay, Editor(s)

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