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Proceedings Paper

Analysis of solvent effect to control the BARC coating uniformity
Author(s): Min-Ho Jung; Sangwoong Yoon; Eun-Soon Chung; Beom-Sang Yoo; Jeong Yun Ya; Don Winning; Boo Deuk Kim; Hong Lee; Do Young Kim; Young Hoon Kim; Myungsun Kim; Young Ho Kim; Sang-Mun Chon
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Paper Abstract

There are many considerations to the design of BARC materials. Among those many properties, one important property that can effect lithographic performance is BARC coating uniformity. In general, the basic coating property (conformal or planar) depends on basic characteristics of polymer (Mw, chemistry, etc). But another major factor to control the coating uniformity is the choice of solvent system in the formulation of the BARC. According to our experimental results, two major factors that can affect the coating uniformity of one BARC are the vapor pressure and the hydrophilicity of solvents. If any solvent has too high vapor pressure and high hydrophilicity relatively, polymer segregation occurs in BARC surface area in case of high humidity condition, resulted in bad coating uniformity. In this paper, we will show basic evaluation results including the morphology change of BARC surface with several solvents which can be used in BARC formulation according to various humidity and temperature conditions. And also we will show the solution to overcome this problem in device manufacturing.

Paper Details

Date Published: 14 May 2004
PDF: 8 pages
Proc. SPIE 5376, Advances in Resist Technology and Processing XXI, (14 May 2004); doi: 10.1117/12.533924
Show Author Affiliations
Min-Ho Jung, Rohm and Haas Electronic Materials Korea Ltd. (South Korea)
Sangwoong Yoon, Samsung Electronics Co., Ltd. (South Korea)
Eun-Soon Chung, Rohm and Haas Electronic Materials Korea Ltd. (South Korea)
Beom-Sang Yoo, Rohm and Haas Electronic Materials Korea Ltd. (South Korea)
Jeong Yun Ya, Rohm and Haas Electronic Materials Korea Ltd. (South Korea)
Don Winning, Rohm and Haas Electronic Materials (United States)
Boo Deuk Kim, Samsung Electronics Co., Ltd. (South Korea)
Hong Lee, Samsung Electronics Co., Ltd. (South Korea)
Do Young Kim, Samsung Electronics Co., Ltd. (South Korea)
Young Hoon Kim, Samsung Electronics Co., Ltd. (South Korea)
Myungsun Kim, Samsung Electronics Co., Ltd. (South Korea)
Young Ho Kim, Samsung Electronics Co., Ltd. (Korea, Republic of)
Sang-Mun Chon, Samsung Electronics Co., Ltd. (South Korea)


Published in SPIE Proceedings Vol. 5376:
Advances in Resist Technology and Processing XXI
John L. Sturtevant, Editor(s)

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