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Proceedings Paper

High-NA focusing grating coupler using a blue laser
Author(s): Yeung Joon Sohn; Yongwoo Park; Dongwoo Suh; Hojun Ryu; Mun Cheol Paek
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Paper Abstract

A focusing grating coupler (FGC) using a blue laser of a wavelength of 400 nm as a light source was fabricated for the first time. The FGC was designed to have a numerical aperture of 0.48 and a focusing angle of zero. The focal length and the grating area were 900 μm and 1×1mm2, respectively. Grating pattern of a minimum period of 0.2μm was fabricated on a single mode waveguide based on the boron phosphor silicate glass (BPSG) material by electron-beam lithography process using the vector scan method. The spot size at the full width (1/e2) was measured at 0.85 and 0.92μM in x and y direction, respectively, and these values are nearly same as the diffraction limited size.

Paper Details

Date Published: 16 September 2003
PDF: 6 pages
Proc. SPIE 5069, Optical Data Storage 2003, (16 September 2003); doi: 10.1117/12.533128
Show Author Affiliations
Yeung Joon Sohn, Electronics and Telecommunications Research Institute (South Korea)
Yongwoo Park, Electronics and Telecommunications Research Institute (South Korea)
Dongwoo Suh, Electronics and Telecommunications Research Institute (South Korea)
Hojun Ryu, Electronics and Telecommunications Research Institute (South Korea)
Mun Cheol Paek, Electronics and Telecommunications Research Institute (South Korea)


Published in SPIE Proceedings Vol. 5069:
Optical Data Storage 2003
Michael O'Neill; Naoyasu Miyagawa, Editor(s)

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