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Proceedings Paper

Confirmation of large-periphery compressible gas flow model for microvalves
Author(s): Albert K. Henning
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Paper Abstract

Previously, a compressible gas flow model was proposed, which couples microvalve structural parameters to gas parameters and flow boundary conditions, and which explained the behavior of compressible flow over a large range of conditions. However, only a limited set of data, from a single orifice for the valve seat, was used to substantiate the model. Multiple-hole or large-periphery valve seat structures were not measured. In this work, the proposed comprehensive compressible gas flow model for microvalves is confirmed using measurements of flow through multi-hole valve seat structures in microvalves.

Paper Details

Date Published: 24 January 2004
PDF: 8 pages
Proc. SPIE 5344, MEMS/MOEMS Components and Their Applications, (24 January 2004); doi: 10.1117/12.532665
Show Author Affiliations
Albert K. Henning, Redwood Microsystems, Inc. (United States)


Published in SPIE Proceedings Vol. 5344:
MEMS/MOEMS Components and Their Applications
Siegfried W. Janson; Albert K. Henning, Editor(s)

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