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Proceedings Paper

Microfabrication technologies for missile components
Author(s): Tracy Dean Hudson; Paul R. Ashley; Mark G. Temmen; Michael S. Kranz; Milan Buncick; Eric Tuck; Deanna K. McMillen
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Paper Abstract

This invited communication presents the microfabrication technologies, and associated issues, being developed by the U.S. Army’s AMRDEC for missile components. Primary components are inertial sensors and radio frequency switches. Two inertial sensor types are discussed -- fiber optic and micro-electromechanical system (MEMS) gyroscopes. The RF switches are also based on MEMS technology and are a natural extension of the microfabrication processes developed for the MEMS gyroscope.

Paper Details

Date Published: 29 December 2003
PDF: 15 pages
Proc. SPIE 5347, Micromachining Technology for Micro-Optics and Nano-Optics II, (29 December 2003); doi: 10.1117/12.532616
Show Author Affiliations
Tracy Dean Hudson, U.S. Army Aviation and Missile Command (United States)
Paul R. Ashley, U.S. Army Aviation and Missile Command (United States)
Mark G. Temmen, U.S. Army Aviation and Missile Command (United States)
Michael S. Kranz, Morgan Research Corp. (United States)
Milan Buncick, AEgis Technologies Group, Inc. (United States)
Eric Tuck, AEgis Technologies Group, Inc. (United States)
Deanna K. McMillen, AEgis Technologies Group, Inc. (United States)


Published in SPIE Proceedings Vol. 5347:
Micromachining Technology for Micro-Optics and Nano-Optics II
Eric G. Johnson; Gregory P. Nordin, Editor(s)

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