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Proceedings Paper

Silicon micro-optics for smart light control
Author(s): Gleb Vdovin; Davies W. de Lima Monteiro; Ourang Akhzar-Mehr; Mikhail Y. Loktev; Serhat Sakarya; Oleg Soloviev; Pasqualina M. Sarro
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Paper Abstract

We present an overview of the results of our recent research in the field of adaptive optical components based on silicon microtechnologies, including membrane deformable mirrors, spatial light modulators, liquid-crystal correctors, wavefront sensors, and both spherical and aspherical micro-optical components. We aim at the realization of adaptive optical systems using standard-technology solutions.

Paper Details

Date Published: 24 January 2004
PDF: 15 pages
Proc. SPIE 5348, MOEMS Display and Imaging Systems II, (24 January 2004); doi: 10.1117/12.532482
Show Author Affiliations
Gleb Vdovin, Technische Univ. Delft (Netherlands)
Davies W. de Lima Monteiro, Technische Univ. Delft (Netherlands)
Ourang Akhzar-Mehr, Technische Univ. Delft (Netherlands)
Mikhail Y. Loktev, Technische Univ. Delft (Netherlands)
Serhat Sakarya, Technische Univ. Delft (Netherlands)
Oleg Soloviev, Technische Univ. Delft (Netherlands)
Pasqualina M. Sarro, Technische Univ. Delft (Netherlands)


Published in SPIE Proceedings Vol. 5348:
MOEMS Display and Imaging Systems II
Hakan Urey; David L. Dickensheets, Editor(s)

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