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Proceedings Paper

Measurement of a laterally deformable optical MEMS grating transducer
Author(s): Dustin W. Carr; Bianca E. N. Keeler; John P. Sullivan; Thomas A. Friedmann; Joel R. Wendt
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Paper Abstract

We have experimentally demonstrated operation of a laterally deformable optical NEMS grating transducer. The device is fabricated in amorphous diamond on a silicon substrate with standard lithographic techniques. For small changes in the spacing of the grating elements, a large change in the optical reflection amplitude is observed. An in-plane motion detection sensitivity of 160 fm/√Hz has been measured, which agrees well with theoretical models. This sensitivity compares favorably to that of any other MEMS transducer. Calculations predict that this sensitivity could be improved by up to two orders of magnitude in future designs. As well as having applications to the field of accelerometers and other inertial sensors, this device could also be used as a modulator for optical switching.

Paper Details

Date Published: 24 January 2004
PDF: 8 pages
Proc. SPIE 5346, MOEMS and Miniaturized Systems IV, (24 January 2004); doi: 10.1117/12.532340
Show Author Affiliations
Dustin W. Carr, Sandia National Labs. (United States)
Bianca E. N. Keeler, Sandia National Labs. (United States)
John P. Sullivan, Sandia National Labs. (United States)
Thomas A. Friedmann, Sandia National Labs. (United States)
Joel R. Wendt, Sandia National Labs. (United States)

Published in SPIE Proceedings Vol. 5346:
MOEMS and Miniaturized Systems IV
Ayman El-Fatatry, Editor(s)

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