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Proceedings Paper

The reliability of RF-MEMS: failure modes, test procedures, and instrumentation
Author(s): Ingrid De Wolf
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Paper Abstract

This paper discusses some reliability issues that play a role for capacitive RF MEMS switches. We describe how these degradation mechanisms affect the functioning of the switches. Also the methodology that can be used to test capacitive RF MEMS switches, including some packaging aspects, and dedicated instrumentation required to perform these tests are discussed.

Paper Details

Date Published: 23 December 2003
PDF: 8 pages
Proc. SPIE 5343, Reliability, Testing, and Characterization of MEMS/MOEMS III, (23 December 2003); doi: 10.1117/12.532335
Show Author Affiliations
Ingrid De Wolf, IMEC (Belgium)


Published in SPIE Proceedings Vol. 5343:
Reliability, Testing, and Characterization of MEMS/MOEMS III
Danelle M. Tanner; Rajeshuni Ramesham, Editor(s)

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