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Proceedings Paper

Laser-assisted methods for nanofabrication
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Paper Abstract

An overview of laser-assisted nanofabrication methods, which has been developed in the Laser Processing Laboratory, is presented. All methods imply the laser-related ablation of material from a solid target and the production of nanoparticles or nanostructures. We consider the nanofabrication process in both the gaseous and in the liquid ambience under different parameters of laser radiation. A particular attention is given on the absence or presence of the plasma-related absorption of the laser radiation, which make possible different nanofabrication regimes. The methods lead to a production of nanomaterials, which are of importance for photonics and biosensing applications.

Paper Details

Date Published: 15 July 2004
PDF: 13 pages
Proc. SPIE 5339, Photon Processing in Microelectronics and Photonics III, (15 July 2004); doi: 10.1117/12.532281
Show Author Affiliations
Andrei V. Kabashin, Ecole Polytechnique de Montreal (Canada)
Michel Meunier, Ecole Polytechnique de Montreal (Canada)

Published in SPIE Proceedings Vol. 5339:
Photon Processing in Microelectronics and Photonics III
Jan J. Dubowski; Peter R. Herman; Friedrich G. Bachmann; Willem Hoving; Jim Fieret; David B. Geohegan; Frank Träger; Kunihiko Washio; Alberto Pique; Xianfan Xu; Tatsuo Okada, Editor(s)

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