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Proceedings Paper

Thin film transfer fabrication techniques for heterogeneous integration of IR thermal detector imaging arrays
Author(s): Isoris S Gergis
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Date Published:
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Proc. SPIE 5348, MOEMS Display and Imaging Systems II, ; doi: 10.1117/12.532193
Show Author Affiliations
Isoris S Gergis, Rockwell Science Ctr. (United States)


Published in SPIE Proceedings Vol. 5348:
MOEMS Display and Imaging Systems II
Hakan Urey; David L. Dickensheets, Editor(s)

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