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Proceedings Paper

High-speed polyimide-planarized vertical-cavity surface-emitting lasers
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Paper Abstract

Oxide-confined, polyimide-planarized 850 nm vertical cavity surface emitting lasers (VCSELs) with excellent high-speed performance were fabricated and characterized. The reproducible, simple process provides good metal adhesion to photodefined polyimide offering low capacitance without implantation or semi-insulating substrates. Microwave measurements are used to extract parameters for a physically based equivalent circuit for the VCSEL.

Paper Details

Date Published: 16 June 2004
PDF: 7 pages
Proc. SPIE 5364, Vertical-Cavity Surface-Emitting Lasers VIII, (16 June 2004); doi: 10.1117/12.532016
Show Author Affiliations
Ahmad N. AL-Omari, Colorado State Univ. (United States)
Kevin L. Lear, Colorado State Univ. (United States)


Published in SPIE Proceedings Vol. 5364:
Vertical-Cavity Surface-Emitting Lasers VIII
Chun Lei; Kent D. Choquette; Sean P. Kilcoyne, Editor(s)

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