Share Email Print

Proceedings Paper

Uniformity analysis and design optimization of multilayer thin film filters used in fiber optics communication systems
Author(s): Minghong Yang; Jinsong Liu; Qingming Chen; Bo Zhang
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Thin film filters used in fibre optics communications are strictly defined, which requires a totally uniform thickness distribution over the coated substrate. In this paper we firstly analyse the thickness distribution related to chamber geometry and source emission function. Chamber layout and source function are optimised for large area uniformity.

Paper Details

Date Published: 25 February 2004
PDF: 6 pages
Proc. SPIE 5250, Advances in Optical Thin Films, (25 February 2004); doi: 10.1117/12.531887
Show Author Affiliations
Minghong Yang, Huazhong Univ. of Science and Technology (China)
Jinsong Liu, Huazhong Univ. of Science and Technology (China)
Qingming Chen, Huazhong Univ. of Science and Technology (China)
Bo Zhang, Huazhong Univ. of Science and Technology (China)

Published in SPIE Proceedings Vol. 5250:
Advances in Optical Thin Films
Claude Amra; Norbert Kaiser; H. Angus Macleod, Editor(s)

© SPIE. Terms of Use
Back to Top