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Proceedings Paper

Automated system for interferometric out-of-plane and in-plane microelements measurement
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Paper Abstract

The automated system for microelement testing, which consists of Twyman-Green interferometer and waveguide grating interferometer integrated with optical microscope is presented. The microsocpe is additionally equipped with mechanisms to fix, microposition and load a specimen under study. Full-field analysis of out-of-plane and in-plane displacements of microelements is performed at this study. The applicability of the system is proven by performing test of silicon membrane and silicon beam.

Paper Details

Date Published: 24 October 2003
PDF: 7 pages
Proc. SPIE 5125, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments, (24 October 2003); doi: 10.1117/12.531537
Show Author Affiliations
Jacek Marcin Kacperski, Warsaw Univ. of Technology (Poland)
Tomasz Sykula, Warsaw Univ. of Technology (Poland)
Malgorzata Kujawinska, Warsaw Univ. of Technology (Poland)
Leszek A. Salbut, Warsaw Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 5125:
Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments
Ryszard S. Romaniuk; Krzysztof T. Pozniak, Editor(s)

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