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Proceedings Paper

Straightness measurement of a linear stage
Author(s): Koji Tenjimbayashi; Hiromitsu Furukawa
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Paper Abstract

The straightness of a linear stage consists of three rotation angle errors and two lateral displacement errors. We show a novel straightness measurement system by using laser beams, simple optical components and position sensing devices.

Paper Details

Date Published: 19 November 2003
PDF: 2 pages
Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); doi: 10.1117/12.531102
Show Author Affiliations
Koji Tenjimbayashi, National Institute of Advanced Industrial Science (Japan)
Hiromitsu Furukawa, National Institute of Advanced Industrial Science (Japan)


Published in SPIE Proceedings Vol. 4829:
19th Congress of the International Commission for Optics: Optics for the Quality of Life
Giancarlo C. Righini; Anna Consortini, Editor(s)

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