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Proceedings Paper

3-D surface profile measurement by 2-D heterodyne low-coherence interferometer
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Paper Abstract

A Novel setup for two-dimensional (2-D) parallel measurements of low-coherence heterodyne signal by using a tandem interferometer and a 2-D sensor has been developed. Generally speaking, it is difficult to obtain heterodyne signals whose frequencies are much higher than the frame rate of the coventional 2-D sensor. A mode-locked femtosecond laser (MLFL) is used as a light source.

Paper Details

Date Published: 19 November 2003
PDF: 2 pages
Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); doi: 10.1117/12.530945
Show Author Affiliations
Hirokazu Matsumoto, National Institute of Advanced Industrial Science (Japan)
Akiko Hirai, National Institute of Advanced Industrial Science (Japan)


Published in SPIE Proceedings Vol. 4829:
19th Congress of the International Commission for Optics: Optics for the Quality of Life
Giancarlo C. Righini; Anna Consortini, Editor(s)

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