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Proceedings Paper

Micro-fabricated spectral analysers
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Paper Abstract

We present several devices using different spectroscopic concepts. First, we show the successive steps and improvements in connection with the Michelson interferometer which we have already realized, in particular the use of fibers to bring in and collimate the light. A possible method to obtain micro-optical elements that are suitable for integration on the interferometer chip is proposed. Then, we present a lamellar grating interferometer, an array of commutable slits to realize a Hadamard transformer, and a movable curved diffraction grating. All of these devices have been realized by silicon micro-machining, more particularly with silicon-on-insulator (SOI) technology.

Paper Details

Date Published: 19 November 2003
PDF: 3 pages
Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); doi: 10.1117/12.530940
Show Author Affiliations
Omar Manzardo, Univ. de Neuchatel (Switzerland)
Yves Petremand, Univ. de Neuchatel (Switzerland)
Hans-Peter Herzig, Univ. de Neuchatel (Switzerland)
Wilfried Noell, Univ. de Neuchatel (Switzerland)
Nico F. de Rooij, Univ. de Neuchatel (Switzerland)


Published in SPIE Proceedings Vol. 4829:
19th Congress of the International Commission for Optics: Optics for the Quality of Life
Giancarlo C. Righini; Anna Consortini, Editor(s)

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