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Proceedings Paper

Effects of hydrogen diffusion and UV irradiation in Pd thin films
Author(s): M. Di Giulio; M. Dinescu; E. Filippo; Vincenzo Nassisi; Daniela Manno; A. Lo Russo
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Paper Abstract

Experimental results concerning the morphologic modification and the presence of new elements in palladium films loaded in hydrogen gas and processed by an excimer laser are presented. The Pd films were deposited on Si(100) wafers and imbedded in hydrogen up to 50 days. Before to be analyzed the films were irradiated with 500 laser shots. The laser fluence was lower than 25 mJ/cm2 in order to avoid the film ablation. The gas pressure was 5 bar. The samples were analyzed by Scanning Electron Microscopy (SEM) and Energy Dispersive X-Ray Spectroscopy (EDX). The films changed their morphology after about eight days whereas grains with new elements were found in samples processed more than thirty days.

Paper Details

Date Published: 19 November 2003
PDF: 2 pages
Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); doi: 10.1117/12.530781
Show Author Affiliations
M. Di Giulio, Univ. degli Studi di Lecce (Italy)
M. Dinescu, Univ. degli Studi di Lecce (Italy)
E. Filippo, Univ. degli Studi di Lecce (Italy)
Vincenzo Nassisi, Univ. degli Studi di Lecce (Italy)
Daniela Manno, Univ. degli Studi di Lecce (Italy)
A. Lo Russo, Univ. degli Studi di Lecce (Italy)


Published in SPIE Proceedings Vol. 4829:
19th Congress of the International Commission for Optics: Optics for the Quality of Life
Giancarlo C. Righini; Anna Consortini, Editor(s)

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