Share Email Print

Proceedings Paper

Original technology applied for manufacturing a cantilever-type piezoresistive micro-accelerometer
Author(s): Niculae N. Dumbravescu; Alin Enescu
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

An original new design for manufacturing a piezo-resistive type micro-accelerometer made by Si bulk micro-machining is proposed. The enhancements applied by the authors especially in design and also in processing and control techniques lead to a more precise device, having a superior reliability. Opposite to classical type, the new model have shorter cantilever, enabling to have an uniform stress and so permitting us a long piezo-resistor design. This in turn enables the use of low surface boron concentration of diffused resistors, resulting in a low temperature drift. After ANSIS simulation, showing the benefits of this new design, it follows the description of layout-based surface and volume control elements, and finally the processing enhancements applied to give a 1g piezo-resistive accelerometer

Paper Details

Date Published: 30 December 2003
PDF: 9 pages
Proc. SPIE 5342, Micromachining and Microfabrication Process Technology IX, (30 December 2003); doi: 10.1117/12.530523
Show Author Affiliations
Niculae N. Dumbravescu, National Institute for Research and Development in Microtechnologies (Romania)
Alin Enescu, Rolast SA (Romania)

Published in SPIE Proceedings Vol. 5342:
Micromachining and Microfabrication Process Technology IX
Mary Ann Maher; Jerome F. Jakubczak, Editor(s)

© SPIE. Terms of Use
Back to Top