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Proceedings Paper

Original technology applied for manufacturing a cantilever-type piezoresistive micro-accelerometer
Author(s): Niculae N. Dumbravescu; Alin Enescu
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Paper Abstract

An original new design for manufacturing a piezo-resistive type micro-accelerometer made by Si bulk micro-machining is proposed. The enhancements applied by the authors especially in design and also in processing and control techniques lead to a more precise device, having a superior reliability. Opposite to classical type, the new model have shorter cantilever, enabling to have an uniform stress and so permitting us a long piezo-resistor design. This in turn enables the use of low surface boron concentration of diffused resistors, resulting in a low temperature drift. After ANSIS simulation, showing the benefits of this new design, it follows the description of layout-based surface and volume control elements, and finally the processing enhancements applied to give a 1g piezo-resistive accelerometer

Paper Details

Date Published: 30 December 2003
PDF: 9 pages
Proc. SPIE 5342, Micromachining and Microfabrication Process Technology IX, (30 December 2003); doi: 10.1117/12.530523
Show Author Affiliations
Niculae N. Dumbravescu, National Institute for Research and Development in Microtechnologies (Romania)
Alin Enescu, Rolast SA (Romania)


Published in SPIE Proceedings Vol. 5342:
Micromachining and Microfabrication Process Technology IX
Mary Ann Maher; Jerome F. Jakubczak, Editor(s)

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