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Proceedings Paper

Ferromagnetism in transition metal-implanted titanium dioxide films
Author(s): Sai-Peng Wong; Yun Gao; Kai Hon Cheng; Chi Fai Chow; Ning Ke; Wing Yiu Cheung; Quan Li; Guo Sheng Shao
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Paper Abstract

In this work, TiO2 thin films were prepared by RF sputtering onto thermally grown oxide layers on Si substrates. Cobalt and iron implantation into the TiO2 films was performed using a metal vapor vacuum arc ion source. The as-implanted and annealed films were characterized using Rutherford backscattering spectrometry, transmission electron microscopy, x-ray diffractometry, x-ray photoelectron spectroscopy, spectroscopic ellipsometry, and vibrating sample magnetometry. The dependence of the magnetic properties on the implantation and annealing conditions were studied in detail. Clear room temperature ferromagnetic properties (RT FM) were observed. The saturation magnetization (Ms) values per implanted Co or Fe atom exhibit an oscillatory dependence on the implantation dose. The maximum Ms in one Co implanted samples was determined to be 2.3 μB/Co, exceeding the bulk Co value. The possible origins of the RT FM properties are discussed.

Paper Details

Date Published: 2 April 2004
PDF: 7 pages
Proc. SPIE 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III, (2 April 2004); doi: 10.1117/12.530435
Show Author Affiliations
Sai-Peng Wong, Chinese Univ. of Hong Kong (Hong Kong China)
Yun Gao, Chinese Univ. of Hong Kong (Hong Kong China)
Kai Hon Cheng, Chinese Univ. of Hong Kong (Hong Kong China)
Chi Fai Chow, Chinese Univ. of Hong Kong (Hong Kong China)
Ning Ke, Chinese Univ. of Hong Kong (Hong Kong China)
Wing Yiu Cheung, Chinese Univ. of Hong Kong (Hong Kong China)
Quan Li, Chinese Univ. of Hong Kong (Hong Kong China)
Guo Sheng Shao, Univ. of Surrey (United Kingdom)


Published in SPIE Proceedings Vol. 5276:
Device and Process Technologies for MEMS, Microelectronics, and Photonics III
Jung-Chih Chiao; Alex J. Hariz; David N. Jamieson; Giacinta Parish; Vijay K. Varadan, Editor(s)

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