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Proceedings Paper

Shack-Hartmann wavefront sensor for optical metrology
Author(s): Bo Qi; Hongbin Chen
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Paper Abstract

A new type of Shack-Hartmann wavefront sensor (SHWS) for optical metrology using digital still camera and a personal computer is designed. There has not expensive image-grabber hardware in this system. We can control image format of storing with this method. In order not to lose information of wavefront, uncompressing image format was selected in our SHWS. We also describe the wavefront reconstruction algorithm in Shack-Hartmann wavefront analyzing software (SHWAS).

Paper Details

Date Published: 19 November 2003
PDF: 2 pages
Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); doi: 10.1117/12.530340
Show Author Affiliations
Bo Qi, Institute of Optics and Electronics (China)
Hongbin Chen, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 4829:
19th Congress of the International Commission for Optics: Optics for the Quality of Life
Giancarlo C. Righini; Anna Consortini, Editor(s)

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