Share Email Print
cover

Proceedings Paper

Novel fabrication of 3D silicon photonic crystal structures using conventional micromachining technology
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Details

Date Published:
PDF
Proc. SPIE 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III, ; doi: 10.1117/12.530287
Show Author Affiliations
Sriram Venkataraman, Univ. of Delaware (United States)
Janusz Murakowski, Univ. of Delaware (United States)
Garrett Schneider, Univ. of Delaware (United States)
Dennis Prather, Univ. of Delaware (United States)


Published in SPIE Proceedings Vol. 5276:
Device and Process Technologies for MEMS, Microelectronics, and Photonics III
Jung-Chih Chiao; Alex J. Hariz; David N. Jamieson; Giacinta Parish; Vijay K. Varadan, Editor(s)

© SPIE. Terms of Use
Back to Top