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Proceedings Paper

Integration of a thermopneumatic micropump, nitinol microvalve, and thermal flow sensor for long-term microflow control
Author(s): Christopher G Cooney; Matthew Piccini; Bruce Towe
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Paper Details

Date Published:
Proc. SPIE 5345, Microfluidics, BioMEMS, and Medical Microsystems II, ; doi: 10.1117/12.530267
Show Author Affiliations
Christopher G Cooney, Arizona State Univ. (United States)
Matthew Piccini, Arizona State Univ. (United States)
Bruce Towe, Arizona State Univ. (United States)

Published in SPIE Proceedings Vol. 5345:
Microfluidics, BioMEMS, and Medical Microsystems II
Peter Woias; Ian Papautsky, Editor(s)

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