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Proceedings Paper

Dependence of barrier height and effective electron mass on gate oxide thickness and nitrogen concentration at SiOxNy /Si interface
Author(s): Chi Yung Ng; Tu Pei Chen; Chew Hoe Ang
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Paper Abstract

In many device modeling and simulations, it is commonly assumed that the barrier height and the effective electron mass are constant regardless of the oxide thickness and the interfacial nitrogen concentration for nitrided oxides. In this work, we have examined the dependence of barrier height and effective electron mass on gate oxide thickness and nitrogen concentration at SiOxNy/Si interface. From the measurement of the direct tunneling and Fowler-Nordheim (FN) tunneling currents we have been able to determine both the barrier height and the effective electron mass without assuming a value for either the effective electron mass or the barrier height. It is observed that with the interfacial nitrogen concentration increased, the barrier height decreases, and the effective electron mass increases. On the other hand, it is also observed that the reduction in the gate oxide thickness leads to a decrease of the barrier height but an increase in the effective electron mass. These results are explained using the electronic structures of SiO2 and SiOxNy.

Paper Details

Date Published: 30 March 2004
PDF: 7 pages
Proc. SPIE 5274, Microelectronics: Design, Technology, and Packaging, (30 March 2004); doi: 10.1117/12.529969
Show Author Affiliations
Chi Yung Ng, Nanyang Technological Univ. (Singapore)
Tu Pei Chen, Nanyang Technological Univ. (Singapore)
Chew Hoe Ang, Chartered Semiconductor Manufacturing, Ltd. (Singapore)


Published in SPIE Proceedings Vol. 5274:
Microelectronics: Design, Technology, and Packaging
Derek Abbott; Kamran Eshraghian; Charles A. Musca; Dimitris Pavlidis; Neil Weste, Editor(s)

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