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Proceedings Paper

Ultrafast laser applications in semiconductor industry
Author(s): Bo Gu
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Paper Abstract

As features and dimensions become smaller, traditional laser processing in semiconductor industry are hitting its limitations due to the thermal effects inherited in long pulse processing. Ultrafast lasers become more reliable and are available commercially. However, their industrial applications, though very desirable due to their non-thermal nature processing, are only limited to those with high value added. Current status of ultrafast laser applications in semiconductor industry is reviewed. Shortcomings of current commercial systems are analyzed. Requirements for ultrafast laser based production system and future direction are discussed.

Paper Details

Date Published: 15 July 2004
PDF: 5 pages
Proc. SPIE 5339, Photon Processing in Microelectronics and Photonics III, (15 July 2004); doi: 10.1117/12.529794
Show Author Affiliations
Bo Gu, GSI Lumonics Inc. (United States)

Published in SPIE Proceedings Vol. 5339:
Photon Processing in Microelectronics and Photonics III
Jan J. Dubowski; Peter R. Herman; Friedrich G. Bachmann; Willem Hoving; Jim Fieret; David B. Geohegan; Frank Träger; Kunihiko Washio; Alberto Pique; Xianfan Xu; Tatsuo Okada, Editor(s)

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