Share Email Print
cover

Proceedings Paper

Both phase-height mapping and coordinates calibration in PMP
Author(s): Xianyu Su; Wanzhong Song; Yiping Cao; Liqun Xiang
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

A new method for the system calibration in phase-measuring profilometry (PMP) is presented. A new calibration gauge containing four virtual calibration planes is designed. With this calibration gauge, both the phase-height mapping and 3D coordinates calibration could be done simultaneously through only one measurement. Additionally, to recover continuous phase distribution of all steps with same height, an iterative procedure is proposed. The effectiveness of the proposed method is demonstrated by experimental results. (Summary only available)

Paper Details

Date Published: 19 November 2003
PDF: 2 pages
Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); doi: 10.1117/12.529727
Show Author Affiliations
Xianyu Su, Sichuan Univ. (China)
Wanzhong Song, Sichuan Univ. (China)
Yiping Cao, Sichuan Univ. (China)
Liqun Xiang, Sichuan Univ. (China)


Published in SPIE Proceedings Vol. 4829:
19th Congress of the International Commission for Optics: Optics for the Quality of Life
Giancarlo C. Righini; Anna Consortini, Editor(s)

© SPIE. Terms of Use
Back to Top