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Proceedings Paper

Measurement of organic/polymer material by phase modulation ellipsometry
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Paper Abstract

Due to they can be tailored to provide a wide range of physical properties and their easiness of processing and fabrication, polymeric materials have found widespread use in the manufacture of microwave, electronics, photonics and bio-tech systems. This paper presents the basic principle of phase modulation spectroscopic ellipsometer (PMSE) and its advantages over other ellipsometry in measuring polymer film. Used for thin film measurements ultra-thin dielectric, meal film and organic film, the PMSE technique is now used over a wide spectral range from the vacuum ultraviolet to the mid infrared. Film thickness ranging from Angstrom up to 50um can be measured by PMSE. Applications of PMSE on measurement and characterization of polymer/organic material are given in the paper.

Paper Details

Date Published: 18 June 2004
PDF: 8 pages
Proc. SPIE 5351, Organic Photonic Materials and Devices VI, (18 June 2004); doi: 10.1117/12.529365
Show Author Affiliations
Yong Ji, Jobin Yvon, Inc. (United States)
Eric Teboul, Jobin Yvon, Inc. (United States)
Alan Richard Kramer, Jobin Yvon, Inc. (United States)

Published in SPIE Proceedings Vol. 5351:
Organic Photonic Materials and Devices VI
James G. Grote; Toshikuni Kaino, Editor(s)

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