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Proceedings Paper

Evaluation of spatial resolution in laser-terahertz emission microscope for inspecting electrical faults in integrated circuits
Author(s): Masatsugu Yamashita; Toshihiko Kiwa; Masayoshi Tonouchi; Kodo Kawase
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Paper Abstract

We have proposed and demonstrated a nondestructive and non-contact inspection method for electrical faults using laser-Terahertz (THz) emission microscopy (LTEM). By measuring the position dependence of the amplitude of the THz emission from integrated circuits (IC) excited with femtosecond (fs) laser pulses, it is possible to investigate the electrical faults in IC. By improving the spatial resolution of the system, we successfully observed the THz emission image of a microprocessor on standby mode. The LTEM system has a spatial resolution about 3µm and it can localize electrically defective sites in the chip to within a ten square microns.

Paper Details

Date Published: 8 April 2004
PDF: 8 pages
Proc. SPIE 5354, Terahertz and Gigahertz Electronics and Photonics III, (8 April 2004); doi: 10.1117/12.528833
Show Author Affiliations
Masatsugu Yamashita, RIKEN - The Institute of Physical and Chemical Reserarch (Japan)
Toshihiko Kiwa, Osaka Univ. (Japan)
Masayoshi Tonouchi, Osaka Univ. (Japan)
Kodo Kawase, RIKEN - The Institute of Physical and Chemical Reserarch (Japan)

Published in SPIE Proceedings Vol. 5354:
Terahertz and Gigahertz Electronics and Photonics III
R. Jennifer Hwu, Editor(s)

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