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Proceedings Paper

Optical beam induced current microscopy at DC and radio frequency
Author(s): Fu-Jen Kao
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Paper Abstract

In this paper we introduce the concept and technique of optical beam induced current (OBIC) generation at radio frequencies. The method is combined with lateral raster scanning of a tightly focused spot so as to generate a mapping of high spatial resolution. We demonstrate experimentally that if a mode-locked laser is used to excite the sample then the frequency transfer function of the optically active device is readily obtained with at least 1 µm spatial resolution, in real time. In addition, with the help of an appropriate electronic arrangement, we demonstrate how to obtain pseudocolored OBIC images of the sample.

Paper Details

Date Published: 8 June 2004
PDF: 8 pages
Proc. SPIE 5353, Semiconductor Photodetectors, (8 June 2004); doi: 10.1117/12.528592
Show Author Affiliations
Fu-Jen Kao, National Sun Yat-Sen Univ. (Taiwan)

Published in SPIE Proceedings Vol. 5353:
Semiconductor Photodetectors
Kurt J. Linden; Eustace L. Dereniak, Editor(s)

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