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Proceedings Paper

Improvements of some non-conventional technologies for micro-optics at IMT-Bucharest
Author(s): Niculae Dumbravescu
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Paper Abstract

The "traditional" silicon planar technology, generating the field of micro-optics produces only a few shapes. To avoid that, many "non-conventional" technologies, based especially on photo-polymers, are investigating. This paper reports on some enhancements of such three technologies: LiGa, gray-tone lithography and embossing.

Paper Details

Date Published: 19 November 2003
PDF: 2 pages
Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); doi: 10.1117/12.527055
Show Author Affiliations
Niculae Dumbravescu, National Inst for Res and Dev in Microtechnologies (Romania)


Published in SPIE Proceedings Vol. 4829:
19th Congress of the International Commission for Optics: Optics for the Quality of Life
Giancarlo C. Righini; Anna Consortini, Editor(s)

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