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Proceedings Paper

Confocal imaging algorithm for profiling rough surfaces with non-gaussian spectra
Author(s): J. Felix Aguilar
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Paper Abstract

The confocal imaging algorithm is applied to retrieve the profile of 1-D rough surfaces with non-gaussian spectra. Different forms of the autocovariance function are tried in the simulation, gaussian included for reference. The capability and the limitations of the algorithm for each function are to be set in terms of the parameters of roughness such as the rms and the correlation length.

Paper Details

Date Published: 19 November 2003
PDF: 2 pages
Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); doi: 10.1117/12.527052
Show Author Affiliations
J. Felix Aguilar, Instituto Nacional de Astrofisica Optica y Electronica (Mexico)


Published in SPIE Proceedings Vol. 4829:
19th Congress of the International Commission for Optics: Optics for the Quality of Life
Giancarlo C. Righini; Anna Consortini, Editor(s)

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