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Proceedings Paper

Real-time precision displacement measurement interferometer using the robust discrete time Kalman filter
Author(s): YongWoo Lee; TongJin Park; HyunSeok Choi; ChangSoo Han; TaeHoon Choi; NakKyu Lee; HyoungWook Lee; KyungHwan Na
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Paper Abstract

This paper proposes a robust discrete time Kalman filter (RDKF) for the dynamic compensation of nonlinearity in a homodyne laser interferometer for high-precision displacement measurement and in real-time. The interferometer system is modeled to reduce the calculation of the estimator. A regulator is applied to improve the robustness of the system. An estimator based on dynamic modeling and a zero regulator of the system was designed by the authors of this study. For real measurement, the experimental results show that the proposed interferometer system can be applied to high precision displacement measurement in real-time.

Paper Details

Date Published: 15 July 2004
PDF: 11 pages
Proc. SPIE 5339, Photon Processing in Microelectronics and Photonics III, (15 July 2004); doi: 10.1117/12.526563
Show Author Affiliations
YongWoo Lee, LG Production Engineering Research Ctr. (South Korea)
TongJin Park, Hanyang Univ. (South Korea)
HyunSeok Choi, Hanyang Univ. (South Korea)
ChangSoo Han, Hanyang Univ. (South Korea)
TaeHoon Choi, Korea Institute of Industrial Technology (South Korea)
NakKyu Lee, Korea Institute of Industrial Technology (South Korea)
HyoungWook Lee, Korea Institute of Industrial Technology (South Korea)
KyungHwan Na, Korea Institute of Industrial Technology (South Korea)


Published in SPIE Proceedings Vol. 5339:
Photon Processing in Microelectronics and Photonics III
Jan J. Dubowski; Peter R. Herman; Friedrich G. Bachmann; Willem Hoving; Jim Fieret; David B. Geohegan; Frank Träger; Kunihiko Washio; Alberto Pique; Xianfan Xu; Tatsuo Okada, Editor(s)

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