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Proceedings Paper

First use of a high-sensitivity active pixel sensor array as a detector for electron microscopy
Author(s): Nguyen-Huu Xuong; Anna-Clare Milazzo; Philippe LeBlanc; Fred Duttweiler; James Bouwer; Steve Peltier; Mark Ellisman; Peter Denes; Fred Bieser; Howard S. Matis; Howard Wieman; Stuart Kleinfelder
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Paper Abstract

There is an urgent need to replace film and CCD cameras as recording instruments for transmission electron microscopy (TEM). Film is too cumbersome to process and CCD cameras have low resolution, marginal to poor signal-to-noise ratio for single electron detection and high spatial distortion. To find a replacement device, we have tested a high sensitivity active pixel sensor (APS) array currently being developed for nuclear physics. The tests were done at 120 keV in a JEOL 1200 electron microscope. At this energy, each electron produced on average a signal-tonoise ratio about 20/1. The spatial resolution was also excellent with the full width at half maximum (FWHM) about 20 microns. Since it is very radiation tolerant and has almost no spatial distortion, the above tests showed that a high sensitivity CMOS APS array holds great promise as a direct detection device for electron microscopy.

Paper Details

Date Published: 7 June 2004
PDF: 8 pages
Proc. SPIE 5301, Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications V, (7 June 2004); doi: 10.1117/12.526021
Show Author Affiliations
Nguyen-Huu Xuong, Univ. of California/San Diego (United States)
Anna-Clare Milazzo, Univ. of California/San Diego (United States)
Philippe LeBlanc, Univ. of California/San Diego (United States)
Fred Duttweiler, Univ. of California/San Diego (United States)
James Bouwer, Univ. of California/San Diego (United States)
Steve Peltier, Univ. of California/San Diego (United States)
Mark Ellisman, Univ. of California/San Diego (United States)
Peter Denes, Lawrence Berkeley National Lab. (United States)
Fred Bieser, Lawrence Berkeley National Lab. (United States)
Howard S. Matis, Lawrence Berkeley National Lab. (United States)
Howard Wieman, Lawrence Berkeley National Lab. (United States)
Stuart Kleinfelder, Univ. of California/Irvine (United States)


Published in SPIE Proceedings Vol. 5301:
Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications V
Nitin Sampat; Morley M. Blouke; Ricardo J. Motta, Editor(s)

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