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Proceedings Paper

Enabling high-data-rate imaging applications with Grating Light Valve technology
Author(s): Alexander Payne; Wilhelmus DeGroot; Robert Monteverde; David Amm
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Paper Abstract

The Grating Light Valve diffractive MOEMS device has been successfully used in imaging applications (lithography and display) requiring image data-rates of 1-5 giga-bits per second (Gb/s). However, new applications such as maskless photolithography and high performance displays require larger pixel counts and finer control of gray-scale. This paper discusses the suitability of the GLV device for high data-rate applications. It discusses the factors governing GLV device switching speed and illustrates how these properties are optimized relative to other requirements of the imaging system.

Paper Details

Date Published: 24 January 2004
PDF: 13 pages
Proc. SPIE 5348, MOEMS Display and Imaging Systems II, (24 January 2004); doi: 10.1117/12.525886
Show Author Affiliations
Alexander Payne, Silicon Light Machines (United States)
Wilhelmus DeGroot, Silicon Light Machines (United States)
Robert Monteverde, Silicon Light Machines (United States)
David Amm, Silicon Light Machines (United States)


Published in SPIE Proceedings Vol. 5348:
MOEMS Display and Imaging Systems II
Hakan Urey; David L. Dickensheets, Editor(s)

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