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Proceedings Paper

Glass waveguides obtained by sputtering of a photosensitive glass target
Author(s): Daniel Milanese; Monica Ferraris; C. Fabrizio Pirri
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Paper Abstract

RF sputtering of an amorphous photosensitive target at different deposition temperature and time conditions was performed in order to obtain thin film planar waveguides for telecom applications. Silica glass was used as a substrate, the chosen target was for the first time a photosensitive SiO2:GeO2:Na2O glass and the process was carried out under Ar atmosphere. The so-obtained thin films were tested in terms of composition, microstructure and optical properties. A planar waveguide was obtained at room temperature, with a refractive index of 1.5707 at a measurement wavelength of 1553 nm, with respect to a refractive index value of the substrate of 1.45.

Paper Details

Date Published: 19 November 2003
PDF: 2 pages
Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); doi: 10.1117/12.525857
Show Author Affiliations
Daniel Milanese, Politecnico di Torino (Italy)
Monica Ferraris, Politecnico di Torino (Italy)
C. Fabrizio Pirri, Politecnico di Torino (Italy)


Published in SPIE Proceedings Vol. 4829:
19th Congress of the International Commission for Optics: Optics for the Quality of Life
Giancarlo C. Righini; Anna Consortini, Editor(s)

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