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Proceedings Paper

Chromatic confocal detection for high-speed microtopography measurements
Author(s): Aiko K. Ruprecht; Klaus Koerner; Tobias F. Wiesendanger; Hans J. Tiziani; Wolfgang Osten
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Paper Abstract

The chromatic confocal approach enables the parallelization of the complete depth-scan of confocal topography measurements. Therefore, mechanical movement can be reduced or completely avoided and the measurement times shortened. Chromatic confocal point sensors are already commercially available but they need lateral scanning in x- and y-direction in order to measure surface topographies. We achieved a further parallelization in the x-direction by realizing a chromatic confocal line sensor using a line focus and a spectrometer. In a second setup, we realized an area measuring chromatic confocal microscope, which is capable of one-shot measurements without any mechanical scanning. The depth resolution of this setup can be improved by measuring in a small number of different heights. Additional information about the color distribution of the object is gained.

Paper Details

Date Published: 16 April 2004
PDF: 8 pages
Proc. SPIE 5302, Three-Dimensional Image Capture and Applications VI, (16 April 2004); doi: 10.1117/12.525658
Show Author Affiliations
Aiko K. Ruprecht, Univ. Stuttgart (Germany)
Klaus Koerner, Univ. Stuttgart (Germany)
Tobias F. Wiesendanger, Univ. Stuttgart (Germany)
Hans J. Tiziani, Univ. Stuttgart (Germany)
Wolfgang Osten, Univ. Stuttgart (Germany)

Published in SPIE Proceedings Vol. 5302:
Three-Dimensional Image Capture and Applications VI
Brian D. Corner; Peng Li; Roy P. Pargas, Editor(s)

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