Share Email Print
cover

Proceedings Paper

Sol-gel hybrid channel waveguide fabrication using UV excimer laser patterning
Author(s): P. J. Moreira; P. V.S. Marques; Antonio M. P. P. Leite
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Definition of channel waveguides on hybrid sol-gel material was demonstrated using a 248 nm UV excimer laser, without mixing organic photoinitiators in the solution preparation step. Thin films fabricated by hydrolysis and polycondensation of methacryloxypropyltrimethoxysilane (MAPTMS) doped with zirconium oxide were deposited by spin-coating on soda-lime glass substrates (n = 1.514). Channel waveguides were defined by microlithography and then covered by a protective layer composed of a combination of MAPTMS and tetramethoxysilane (TMOS). Finally, after cutting and polishing, the waveguides were optically characterized.

Paper Details

Date Published: 19 November 2003
PDF: 2 pages
Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); doi: 10.1117/12.525507
Show Author Affiliations
P. J. Moreira, INESC (Portugal)
P. V.S. Marques, INESC (Portugal)
Antonio M. P. P. Leite, INESC (Portugal)


Published in SPIE Proceedings Vol. 4829:
19th Congress of the International Commission for Optics: Optics for the Quality of Life
Giancarlo C. Righini; Anna Consortini, Editor(s)

© SPIE. Terms of Use
Back to Top