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Proceedings Paper

Interferometric absolute measurement of flatness along circles and their unification
Author(s): Shohachi Sonozaki; Koichi Iwata; Yoshihisa Iwahashi
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Paper Abstract

Profile along a circle on precise mirror can be determined with no standard by measuring spacing between a mirror and another reference mirror. Accuracy of the reference mirror needs not be higher than that of the mirror to be measured. The absolute measurement based on this principle is made with a Fizeau interferometer. The result shows that the profile of a flat mirror can be measured in an accuracy of nm though the accuracy of reference mirror is in the order of μm. In order to extend this measurement to profile on a whole surface, we have to measure profiles along different circles and unify them. This unification does not seem to be done without a linear standard.

Paper Details

Date Published: 19 November 2003
PDF: 2 pages
Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); doi: 10.1117/12.524827
Show Author Affiliations
Shohachi Sonozaki, Takamatsu National College of Technology (Japan)
Koichi Iwata, Osaka Prefecture Univ. (Japan)
Yoshihisa Iwahashi, Osaka Sangyo Univ. Junior College (Japan)


Published in SPIE Proceedings Vol. 4829:
19th Congress of the International Commission for Optics: Optics for the Quality of Life
Giancarlo C. Righini; Anna Consortini, Editor(s)

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