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Proceedings Paper

Sensitivity of piezoresistive readout device for microfabricated acoustic spectrum analyzer
Author(s): Harold L. Stalford; Christopher A. Apblett; Seethambal S. Mani; W. Kent Schubert; Mark W. Jenkins
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Paper Abstract

A readout mechanism has been developed for measuring the response of mechanical microresonators to be used in an array for a microfabricated acoustic spectrum analyzer. It is based on the piezo-resistive property of polysilicon. The piezo-resistive readout mechanism is constructed in a quarter Wheatstone bridge fashion in which four equal serpentine polysilicon patterns are fabricated on top of a dielectric layer of silicon nitride. Microresonator devices using cantilever and clamped-clamped beam types with piezo-resistive readout mechanisms are fabricated using the surface micromachining technology of SUMMiTTM. The sensitivity of the piezo-resistive mechanism is characterized using 10 volts as supply on the Wheatstone bridge and no amplification of signal. The testing is conducted with electrostatic drive potentials 0-75 volts. Sensitivity of 1-5 millivolts per micron of beam deflection was observed by the characterization.

Paper Details

Date Published: 24 January 2004
PDF: 8 pages
Proc. SPIE 5344, MEMS/MOEMS Components and Their Applications, (24 January 2004); doi: 10.1117/12.524628
Show Author Affiliations
Harold L. Stalford, Consultant (United States)
Univ. of Oklahoma (United States)
Christopher A. Apblett, Sandia National Labs. (United States)
Seethambal S. Mani, Sandia National Labs. (United States)
W. Kent Schubert, Sandia National Labs. (United States)
Mark W. Jenkins, Sandia National Labs. (United States)

Published in SPIE Proceedings Vol. 5344:
MEMS/MOEMS Components and Their Applications
Siegfried W. Janson; Albert K. Henning, Editor(s)

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