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Proceedings Paper

Laser processes for prototyping and production of novel microfluidic structures
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Paper Abstract

We describe a number of microfluidic components that have been formed by laer micromachining and incorporated in a picoliter droplet dispenser. The laser micromachined structures include an adhesive interface between macrofluidic and microfluidic regions, a particle filter, a fluid manifold, channels, and nozzles. Both excimer laser and C02 laser processes are used.

Paper Details

Date Published: 23 December 2003
PDF: 12 pages
Proc. SPIE 5345, Microfluidics, BioMEMS, and Medical Microsystems II, (23 December 2003); doi: 10.1117/12.524547
Show Author Affiliations
John R. Andrews, Xerox Corp. (United States)
Bradley Gerner, Xerox Corp. (United States)


Published in SPIE Proceedings Vol. 5345:
Microfluidics, BioMEMS, and Medical Microsystems II
Peter Woias; Ian Papautsky, Editor(s)

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