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Proceedings Paper

Low-voltage 256-electrode membrane mirror system for adaptive optics
Author(s): Peter L. Kurczynski; Harold M. Dyson; Bernard Sadoulet; J. Eric Bower; Warren Y-C. Lai; William M. Mansfield; J. Ashley Taylor
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Paper Abstract

Low stress membrane mirrors will allow improved wave front correction in vision science and astronomical adaptive optics systems. We have fabricated low stress membrane mirrors from single crystal silicon, and flip chip bonded membranes to electrode arrays. These devices operate at lower voltage and have greater stroke than existing membrane mirror devices; they have 256 control electrodes, and are driven by off chip electronics. Devices have a single electrode plane and are pre-biased to allow full wave front correction. We have demonstrated these devices in an adaptive optics system consisting of a coherent source, and a Shack-Hartmann wave front sensor. We compare the experimental performance of the devices to computer simulations and theoretical calculations.

Paper Details

Date Published: 24 January 2004
PDF: 9 pages
Proc. SPIE 5346, MOEMS and Miniaturized Systems IV, (24 January 2004); doi: 10.1117/12.524486
Show Author Affiliations
Peter L. Kurczynski, Lucent Technologies/Bell Labs. (United States)
Univ. of California/Berkeley (United States)
Harold M. Dyson, Lucent Technologies/Bell Labs. (United States)
Univ. of California/Berkeley (United States)
Bernard Sadoulet, Univ. of California/ Berkeley (United States)
J. Eric Bower, Lucent Technologies/Bell Labs. (United States)
New Jersey Nanotechnology Consortium (United States)
Warren Y-C. Lai, Lucent Technologies/Bell Labs. (United States)
New Jersey Nanotechnology Consortium (United States)
William M. Mansfield, Lucent Technologies/Bell Labs. (United States)
New Jersey Nanotechnology Consortium (United States)
J. Ashley Taylor, Lucent Technologies/Bell Labs. (United States)
New Jersey Nanotechnology Consortium (United States)


Published in SPIE Proceedings Vol. 5346:
MOEMS and Miniaturized Systems IV
Ayman El-Fatatry, Editor(s)

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