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Proceedings Paper

Optimizing microfluidic ink delivery for dip pen nanolithography
Author(s): Debjyoti Banerjee; Nabil A. Amro; Joe Fragala
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Paper Abstract

This work demonstrates the design optimization, fabrication process development, process optimization and testing of a microfluidic ink delivery apparatus (called "Inkwells") for simultaneously coating an array of DPN pens with different inks. The objective of this work is to deliver between 4 and 10 different inks from reservoirs into appropriately spacd microwell array. A tips of the multi-pen array are coated with different inks by dipping them into the microwell array. The reservoirs, microwells and their connecting micro-channels were etched in silicon wafers using Deep Reactive Ion Etching (DRIE). Fluid actuation was achieved by capillary wicking. The optimum layouts for different applications were selected with respect to the volume requirement of inks, the efficacy of ink-well filling, to obviate the problem of bubble formation, and to test the operations of dipping and writing with a parallel array of pens.

Paper Details

Date Published: 23 December 2003
PDF: 8 pages
Proc. SPIE 5345, Microfluidics, BioMEMS, and Medical Microsystems II, (23 December 2003); doi: 10.1117/12.524474
Show Author Affiliations
Debjyoti Banerjee, NanoInk, Inc. (United States)
Nabil A. Amro, NanoInk, Inc. (United States)
Joe Fragala, NanoInk, Inc. (United States)


Published in SPIE Proceedings Vol. 5345:
Microfluidics, BioMEMS, and Medical Microsystems II
Peter Woias; Ian Papautsky, Editor(s)

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