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Proceedings Paper

Process design environment for microfabrication technologies
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Paper Abstract

Microfabrication technologies require adequate design methodologies since there is a strong interaction between the shape or the layout of microstructures and their fabrication process sequence. Both areas are subject of design. This paper gives an overview over the different design methodologies in design of microstructures focusing on fabrication process design. To derive the novel design models, the different approaches in digital, analog, mixed-signal, and MEMS design are described. The second part of the paper addresses the state of the art in process flow design tools. Eventually a new software environment based on the design models is presented that is based on current software technologies and platform independent programming

Paper Details

Date Published: 30 December 2003
PDF: 10 pages
Proc. SPIE 5342, Micromachining and Microfabrication Process Technology IX, (30 December 2003); doi: 10.1117/12.524368
Show Author Affiliations
Andreas Wagener, Univ. of Siegen (Germany)
Jens Popp, Univ. of Siegen (Germany)
Kai Hahn, Univ. of Siegen (Germany)


Published in SPIE Proceedings Vol. 5342:
Micromachining and Microfabrication Process Technology IX
Mary Ann Maher; Jerome F. Jakubczak, Editor(s)

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