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Proceedings Paper

Three-dimensional microfabrication using two-photon absorption by femtosecond laser
Author(s): Shin Wook Yi; Seong Ku Lee; Hong Jin Kong; Dong-Yol Yang; Sang-hu Park; Tae-woo Lim; Ran Hee Kim; Kwang-Sup Lee
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Paper Abstract

As a femtosecond laser has recently been developed, both of high power and high photon density are easily obtained. The high photon density results in photopolymerization of urethane acrylate resin whose absorption spectrum is shorter than that of the femtosecond laser. The stereo-lithography using the two-photon absorption (TPA) makes micro structures with great resolution. We used this phenomenon to make micron-sized structures with sub-micron resolution. Before fabricating 3-D structures, precise 2-D structures were preceded. The TPA photopolymerization was applied of poly-dimethyl siloxane (PDMS) molding. In this paper, we report the recent progress and application of this technology in our laboratory.

Paper Details

Date Published: 30 December 2003
PDF: 9 pages
Proc. SPIE 5342, Micromachining and Microfabrication Process Technology IX, (30 December 2003); doi: 10.1117/12.524310
Show Author Affiliations
Shin Wook Yi, Korea Advanced Institute of Science and Technology (South Korea)
Seong Ku Lee, Korea Advanced Institute of Science and Technology (South Korea)
Hong Jin Kong, Korea Advanced Institute of Science and Technology (South Korea)
Dong-Yol Yang, Korea Advanced Institute of Science and Technology (South Korea)
Sang-hu Park, Korea Advanced Institute of Science and Technology (South Korea)
Tae-woo Lim, Korea Advanced Institute of Science and Technology (South Korea)
Ran Hee Kim, Hannam Univ. (South Korea)
Kwang-Sup Lee, Hannam Univ. (South Korea)


Published in SPIE Proceedings Vol. 5342:
Micromachining and Microfabrication Process Technology IX
Mary Ann Maher; Jerome F. Jakubczak, Editor(s)

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