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Proceedings Paper

Modeling nickel electrodeposition in microscreen-based LIGA molds
Author(s): Ken S Chen; Greg H Evans
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Date Published:
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Proc. SPIE 5342, Micromachining and Microfabrication Process Technology IX, ; doi: 10.1117/12.524207
Show Author Affiliations
Ken S Chen, Sandia National Labs. (United States)
Greg H Evans, Sandia National Labs. (United States)


Published in SPIE Proceedings Vol. 5342:
Micromachining and Microfabrication Process Technology IX
Mary Ann Maher; Jerome F. Jakubczak, Editor(s)

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