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Proceedings Paper

Thick microlens array fabricated by soft lithography in hybrid sol-gel glass
Author(s): XiaoCong Yuan; Weixing Yu; Vladimir Kudryashov; Ken-Jin Moh; Nam Quoc Ngo
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Paper Abstract

This paper describes a cost-effective and high-volume soft-lithography method for building microlenses in hybrid sol-gel glass. The fabrication processes comprise the following three steps, namely fabricating microlens array in photoresist as a master lenses, molding replication of the lenses in poly-dimethylsiloxane (PDMS) as elastometric molds and embossing to press the PDMS replica onto the hybrid sol-gel glass. During the embossing process, while the PDMS mold is applied, the sol-gel sample was cured by UV exposure for densification. In this work, the master microlenses were patterned in photoresist using the reflow technique, where the authors took full advantage of the matured photosensitive material and fabrication technologies as the first and transitional step. This method enables us to fabricate thick micro-optical elements in sol-gel glass and it will be suitable for a range of applications in free-space and guided wave optics.

Paper Details

Date Published: 29 December 2003
PDF: 8 pages
Proc. SPIE 5347, Micromachining Technology for Micro-Optics and Nano-Optics II, (29 December 2003); doi: 10.1117/12.524204
Show Author Affiliations
XiaoCong Yuan, Nanyang Technological Univ. (Singapore)
Weixing Yu, Nanyang Technological Univ. (Singapore)
Vladimir Kudryashov, Nanyang Technological Univ. (Singapore)
Ken-Jin Moh, Nanyang Technological Univ. (Singapore)
Nam Quoc Ngo, Nanyang Technological Univ. (Singapore)


Published in SPIE Proceedings Vol. 5347:
Micromachining Technology for Micro-Optics and Nano-Optics II
Eric G. Johnson; Gregory P. Nordin, Editor(s)

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