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Proceedings Paper

Programmable diffraction gratings and their uses in displays, spectroscopy, and communications
Author(s): Stephen D. Senturia
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Paper Abstract

Microelectromechanical Systems ("MEMS") and optics are a natural match. There are several reasons: MEMS devices have dimensions and achievable actuation distances comparable to the wavelength of light; smooth-surfaced dielectrics, semiconductors, and metals can be used in various combinations; and, photons don't weigh anything, so relatively feeble MEMS actuators can easily manipulate them. Many optical MEMS devices are based on mirror arrays that can be tilted using electrostatic actuation. This paper, however, focuses on programmable diffraction gratings and their uses for projection displays, spectroscopy, and wavelength management in modern optical telecommunication systems.

Paper Details

Date Published: 24 January 2004
PDF: 6 pages
Proc. SPIE 5348, MOEMS Display and Imaging Systems II, (24 January 2004); doi: 10.1117/12.523978
Show Author Affiliations
Stephen D. Senturia, Massachusetts Institute of Technology (United States)
Polychromix, Inc. (United States)

Published in SPIE Proceedings Vol. 5348:
MOEMS Display and Imaging Systems II
Hakan Urey; David L. Dickensheets, Editor(s)

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