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Proceedings Paper

MEMS 3D scan mirror
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Paper Abstract

A 1500-μm-diameter silicon/silicon nitride 3D scan mirror has been built using MEMS technology. It is capable of static and dynamic beam scanning achieved with a bi-axial gimbal. A gold-coated deformable membrane at the center of the device provides both focus control (z-axis) and spherical aberration correction. This architecture is able to move the focus of a laser beam throughout a three-dimensional space with a single optical surface, and is referred as a 3D scan mirror. This mirror will be incorporated into a miniature confocal laser scanning microscope for biomedical in-situ imaging applications. In this paper we describe the 3D scan mirror design, fabrication and characterization as well as its target application.

Paper Details

Date Published: 24 January 2004
PDF: 9 pages
Proc. SPIE 5348, MOEMS Display and Imaging Systems II, (24 January 2004); doi: 10.1117/12.523902
Show Author Affiliations
Yuhe Shao, Montana State Univ./Bozeman (United States)
David L. Dickensheets, Montana State Univ./Bozeman (United States)


Published in SPIE Proceedings Vol. 5348:
MOEMS Display and Imaging Systems II
Hakan Urey; David L. Dickensheets, Editor(s)

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